Efficiency Certificate of the multilayer MoRu/Be grating calculated by PCGrate-SX v.6.1 at an angle of incidence of-13.9° for the indicated diffraction orders in the 12—50-nm wavelength range.
International Intellectual Group, Inc.
A world leader in modeling of the diffraction gratings efficiency for spectroscopy, astronomy, telecommunications, photolithography, and nanotechnology.
