Measured and calculated by PCGrate-SX v.6.1 efficiencies of the multilayer MoRu/Be grating at an angle of incidence of -13.9° for the indicated diffraction orders in the 25—50-nm wavelength range.
International Intellectual Group, Inc.
A world leader in modeling of the diffraction gratings efficiency for spectroscopy, astronomy, telecommunications, photolithography, and nanotechnology.
