I. G. Kuznetsov, E. Wilkinson, D. A. Content, R. A. Boucarut, and T. J. Madison, “Grating efficiencies comparison study: calculations versus metrology for various types of high groove density gratings at VUV-UV wavelengths,” in Optical Modeling and Performance Predictions, M. A. Kahan, ed., SPIE Proc., vol. 5178, 2004, pp. 267-277.


LINK